This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
Product Details
- Edition:
- 1.0
- Published:
- 09/27/2005
- Number of Pages:
- 49
- File Size:
- 1 file , 690 KB
- Note:
- This product is unavailable in Ukraine, Russia, Belarus
