IEC 62047-1 Ed. 2.0 b – Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
Product Details
- Edition:
- 2.0
- Published:
- 01/06/2016
- Number of Pages:
- 66
- File Size:
- 1 file , 790 KB
- Note:
- This product is unavailable in Ukraine, Russia, Belarus
