IEC 62047-11 Ed. 1.0 b – Semiconductor devices – Micro-electromechanical devices – Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material’s melting temperature.
Product Details
- Edition:
- 1.0
- Published:
- 07/17/2013
- Number of Pages:
- 38
- File Size:
- 1 file , 820 KB
- Note:
- This product is unavailable in Ukraine, Russia, Belarus
