IEC 62047-21 Ed. 1.0 b – Semiconductor devices – Micro-electromechanical devices – Part 21: Test method for Poisson's ratio of thin film MEMS materials
IEC 62047-21:2014 specifies the determination of Poisson’s ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
Product Details
- Edition:
- 1.0
- Published:
- 06/19/2014
- Number of Pages:
- 26
- File Size:
- 1 file , 480 KB
- Note:
- This product is unavailable in Ukraine, Russia, Belarus
