IEC 62047-32 Ed. 1.0 b – Semiconductor devices – Micro-electromechanical devices – Part 32: Test method for the nonlinear vibration of MEMS resonators
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
Product Details
- Edition:
- 1.0
- Published:
- 01/24/2019
- Number of Pages:
- 37
- File Size:
- 1 file , 1.5 MB
- Note:
- This product is unavailable in Ukraine, Russia, Belarus
